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Yuanpeng Yao
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XPlate
XPlate
1
8
0
evaporator
evaporator
1
10
0
cooling plate511
cooling plate511
1
16
0
tcp
tcp
0
7
0
晶圆冷板
晶圆冷板
2
12
0
Boiling plate
Boiling plate
1
11
0
WSE2
WSE2
0
3
0
spray cooling array
spray cooling array
1
5
0
wsc
wsc
0
2
0
CHX5
CHX5
3
9
0
MFCP
MFCP
1
3
0
CHX4
CHX4
2
7
0
CHX3
CHX3
0
3
0
CHX2
CHX2
0
4
0
chx1
chx1
0
7
0
chx
chx
1
5
0
HBWR
HBWR
0
6
1
New evaporation vessel
New evaporation vessel
2
10
0
ASPRAY
ASPRAY
1
9
0
Cooling plate
Cooling plate
1
6
0
spray array
spray array
0
8
0
Pro Cooling
Pro Cooling
2
9
0
360mmspray
360mmspray
2
11
0
MMC
MMC
0
11
0
1
2